文献详情
Intelligent tuning method of PID parameters based on iterative learning control for atomic force microscopy
文献类型期刊
作者Liu, Hui[1];Li, Yingzi[2];Zhang, Yingxu[3];Chen, Yifu[4];Song, Zihang[5];Wang, Zhenyu[6];Zhang, Suoxin[7];Qian, Jianqiang[8]
机构
通讯作者Li, YZ; Qian, JQ (reprint author), Beihang Univ, Sch Phys & Nucl Energy Engn, Xueyuan Rd 37, Beijing 100191, Peoples R China.
2018
期刊名称MICRON影响因子和分区
来源信息年:2018  卷:104  页码范围:26-36  
104
期刊信息MICRON影响因子和分区  ISSN:0968-4328
关键词Intelligent tuning method; PID parameters; Iterative learning control; Atomic force microscopy
页码范围26-36
增刊正刊
摘要Proportional-integral-derivative (PID) parameters play a vital role in the imaging process of an atomic force microscope (AFM). Traditional parameter tuning methods require a lot of manpower and it is difficult to set PID parameters in unattended working environments. In this manuscript, an intelligent tuning method of PID parameters based on iterative learning control is proposed to self-adjust PID parameters of the AFM according to the sample topography. This method gets enough information about the output signals of PID controller and tracking error, which will be used to calculate the proper PID parameters, by repeated line scanning until convergence before normal scanning to learn the topography. Subsequently, the appropriate PID parameters are obtained by fitting method and then applied to the normal scanning process. The feasibility of the method is demonstrated by the convergence analysis. Simulations and experimental results indicate that the proposed method can intelligently tune PID parameters of the AFM for imaging different topographies and thus achieve good tracking performance.
收录情况SCIE(WOS:000418984200004)  EI(20174304294386)  PubMed(29054026)  
所属部门仪器科学与光电工程学院;物理科学与核能工程学院
DOI10.1016/j.micron.2017.09.009
百度学术Intelligent tuning method of PID parameters based on iterative learning control for atomic force microscopy
语言外文
ISSN0968-4328
人气指数64
浏览次数64
基金National Natural Science Foundation of China [61371008, 61771033]
全部评论(0 条评论)
作者其他论文

Polarization image fusion algorithm based on improved PCNN.

Zhang, Siyuan;Yuan, Yan;Su, Lijuan,等.International Conference on Optical Instruments and Technology (OIT) - Optoelectronic Imaging and Processing Technology.2013,9045.

Gateway Clustering Framework for the Integration of Heterogeneous Aviation Information Networks.

Liu, Hui;Zhang, Jun;Cheng, L. L..IEEE TRANSACTIONS ON AEROSPACE AND ELECTRONIC SYSTEMS.2012,48(3),2282-2301.

MPSoC architectural design and synthesis for real-time biomedical signal processing in gamma cameras.

Sun, Kai;Wei, Hongxing;Wang, Tianmiao,等.BIODEVICES 2008: PROCEEDINGS OF THE FIRST INTERNATIONAL CONFERENCE ON BIOMEDICAL ELECTRONICS AND DEVICES, VOL 2.2008,279-284.

Measurement reduction method for the Millikan oil-drop experiment.

Li, Yingzi;Zhang, Liwen;Shan, Guanqiao,等.EUROPEAN JOURNAL OF PHYSICS.2015,36(5).

登录