文献详情
Characterization of Mechanical Properties of Cantilevered Nd2Fe14B/Ta Magnetic Microstructures
文献类型期刊
作者Jiang, Yonggang[1];Fujita, Takayuki[2];Uehara, Minoru[3];Zhang, Deyuan[4];Cai, Jun[5];Higuchi, Kohei[6];Maenaka, Kazusuke[7]
机构
2011
通讯作者Jiang, YG (reprint author), Beihang Univ, Sch Mech Engn & Automat, Beijing 100191, Peoples R China.
期刊名称APPLIED PHYSICS EXPRESS影响因子和分区
来源信息年:2011  卷:4  期:11  
4
期刊信息APPLIED PHYSICS EXPRESS影响因子和分区  ISSN:1882-0778
11
增刊正刊
摘要The mechanical properties of low-stress cantilevered Nd2Fe14B/Ta multilayered microstructures are characterized. The cantilevered microstructures are fabricated using silicon molding technique and XeF2 gas-phase silicon etching process. The magnetic microcantilevers show relatively high quality factors varying from 75 to 135. The Young's modulus of the Nd2Fe14B/Ta multilayered film is evaluated by fitting the resonance response of the microcantilevers, which is smaller than those of bulk Nd2Fe14B magnets due to the texture effect. The good mechanical properties of the microcantilevers indicate that Nd2Fe14B/Ta multilayered films can be used as a structural material for microsystem applications. In addition, the electromagnetic driving of the Nd2Fe14B/Ta magnetic microcantilever is also demonstrated. (C) 2011 The Japan Society of Applied Physics
收录情况SCIE(WOS:000298289700040)  EI(20114614524115)  
所属部门机械工程及自动化学院
DOI10.1143/APEX.4.116401
百度学术Characterization of Mechanical Properties of Cantilevered Nd2Fe14B/Ta Magnetic Microstructures
语言外文
ISSN1882-0778
被引频次11
人气指数470
浏览次数469
基金National Science Foundation of China [50805005]; National High-tech R&D Program of China [2009AA043804]
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